Transfer of an ultrathin single-crystal silicon film from a silicon-on-insulator to a polymer

نویسندگان

چکیده

This study reports the manufacturing of silicon-on-polymer (SOP). It describes transfer a 200 mm diameter silicon thin film from silicon-on-insulator (SOI) substrate to flexible polymer. The thickness single-crystal was less than nm, and achieved by bonding SOI wafer temporary carrier with an adhesive Various parameters were investigated: adherence stack, temperature bonding, carrier, Si thickness. buried oxide removed mechanical grinding chemical etching. held on tape, dismounted. SOPs consisting 20–205-nm films polymer (230 μm) successfully obtained. Full wafers or patterned 200-mm could be transferred.

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ژورنال

عنوان ژورنال: Materials Today Nano

سال: 2021

ISSN: ['2588-8420']

DOI: https://doi.org/10.1016/j.mtnano.2020.100107